Porous silicon membranes for gas-sensor applications

Sensors and Actuators A: Physical 1995 Vol. 46; Iss. 1-3

Porous silicon membranes for gas-sensor applications

T. Taliercio, M. Dilhan, E. Massone, A. Foucaran, A.M. Gué, T. Bretagnon, B. Fraisse, L. Montès
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Volume:
46
Year:
1995
Pages:
4
DOI:
10.1016/0924-4247(94)00858-f
File:
PDF, 282 KB
1995
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