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Rapid thermal processing of piezoresistive polycrystalline silicon films: An innovative technology for low cost pressure sensor fabrication
B. Semmache, P. Kleimann, M. Le Berre, M. Lemiti, D. Barbier, P. PinardVolume:
46
Year:
1995
Pages:
6
DOI:
10.1016/0924-4247(94)00865-f
File:
PDF, 584 KB
1995