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High-precision readout circuit for LIGA acceleration sensors
O. Krömer, O. Fromhein, H. Gemmeke, T. Kühner, J. Mohr, M. StrohrmannVolume:
46
Year:
1995
Pages:
5
DOI:
10.1016/0924-4247(94)00889-p
File:
PDF, 346 KB
1995