Surface micromachined pressure sensors with integrated CMOS read-out electronics
H. Dudaicevs, M. Kandler, Y. Manoli, W. Mokwa, E. SpiegelVolume:
43
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(94)80002-2
File:
PDF, 1.18 MB
english, 1994