Sputter deposition of TiNi, TiNiPd and TiPd films...

Sensors and Actuators A: Physical 1996 Vol. 53; Iss. 1-3

Sputter deposition of TiNi, TiNiPd and TiPd films displaying the two-way shape-memory effect

E Quandt, C Halene, H Holleck, K Feit, M Kohl, P Schloβmacher, A Skokan, K.D Skrobanck
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Volume:
53
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(96)01147-8
File:
PDF, 759 KB
english, 1996
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