A CMOS-compatible 2-D vertical Hall magnetic-field sensor...

Sensors and Actuators A: Physical 1996 Vol. 53; Iss. 1-3

A CMOS-compatible 2-D vertical Hall magnetic-field sensor using active carrier confinement and post-process micromachining

M Paranjape, L.M Landsberger, Mojtaba Kahrizi
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Volume:
53
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(96)01160-0
File:
PDF, 711 KB
english, 1996
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