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Corona charging damage on thermal Si/SiO2 structures with nm-thick oxides revealed by electron spin resonance
A Stesmans, V.V Afanas'evVolume:
72
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2003.12.016
File:
PDF, 220 KB
english, 2004