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Infrared spectra of photochemically grown suboxides and oxynitrides at the Si/SiO2 interface
Peter Hess, Jochen LambersVolume:
72
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2003.12.037
File:
PDF, 742 KB
english, 2004