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Breakdown mechanisms in ultra-thin oxides: impact of carrier energy and current through substrate hot carrier stress study
G Ribes, S Bruyère, M Denais, F Monsieur, V Huard, D Roy, G GhibaudoVolume:
72
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2003.12.048
File:
PDF, 241 KB
english, 2004