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Surface preparation and post thermal treatment effects on interface properties of thin Al2O3 films deposited by ALD
Y. Chang, F. Ducroquet, E. Gautier, O. Renault, J. Legrand, J.F. Damlencourt, F. MartinVolume:
72
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.01.012
File:
PDF, 412 KB
english, 2004