Damage minimized plasma pore sealing of microporous low k...

Damage minimized plasma pore sealing of microporous low k dielectrics

Thomas Abell, Karen Maex
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
76
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2004.07.014
File:
PDF, 352 KB
english, 2004
Conversion to is in progress
Conversion to is failed