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UVIII for combined e-beam and optical exposure hybrid lithography
Shazia Yasin, M.N. Khalid, Y. Zhang, D.G. HaskoVolume:
78-79
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2004.12.008
File:
PDF, 114 KB
english, 2005