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Particle filters integrated inside a silicon wafer
W.J. Venstra, N.P. Pham, P.M. Sarro, J. van EijkVolume:
78-79
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2004.12.019
File:
PDF, 188 KB
english, 2005