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Exploration of the ultimate patterning potential achievable with focused ion beams
J. Gierak, E. Bourhis, M.N. Mérat Combes, Y. Chriqui, I. Sagnes, D. Mailly, P. Hawkes, R. Jede, L. Bruchhaus, L. Bardotti, B. Prével, A. Hannour, P. Mélinon, A. Perez, J. Ferré, J.-P. Jamet, A. MouginVolume:
78-79
Year:
2005
Language:
english
Pages:
13
DOI:
10.1016/j.mee.2004.12.038
File:
PDF, 532 KB
english, 2005