Antireflection sub-wavelength gratings fabricated by...

Microelectronic Engineering 2005 Vol. 78-79; Iss. none

Antireflection sub-wavelength gratings fabricated by spin-coating replication

Y. Kanamori, E. Roy, Y. Chen
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Volume:
78-79
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.12.039
File:
PDF, 246 KB
english, 2005
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