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New salicidation technology PtSi for strained SiGe device
B. Rong, T. Zijlstra, Y.T. Tang, A.G.R. EvansVolume:
78-79
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.12.041
File:
PDF, 128 KB
english, 2005