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Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision
K. Zimmer, R. Böhme, B. RauschenbachVolume:
78-79
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.12.042
File:
PDF, 251 KB
english, 2005