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Arrayed microcolumn operation with a wafer-scale Einzel lens
Ho-Seob Kim, Dae-Wook Kim, Seungjoon Ahn, Young Chul Kim, Jaewon Cho, Sang-Kook Choi, Dae-Yong KimVolume:
78-79
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.12.092
File:
PDF, 275 KB
english, 2005