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Implication of the light polarisation for UV curing of pre-patterned resists
M. Wissen, N. Bogdanski, H.-C. Scheer, A. Bitz, G. Ahrens, G. GruetznerVolume:
78-79
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.12.099
File:
PDF, 399 KB
english, 2005