Reliability studies of narrow Cu lines

Microelectronic Engineering 2005 Vol. 82; Iss. 3-4

Reliability studies of narrow Cu lines

Günther Schindler, Sabine Penka, Gernot Steinlesberger, Martin Traving, Werner Steinhögl, Manfred Engelhardt
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
82
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2005.07.069
File:
PDF, 255 KB
english, 2005
Conversion to is in progress
Conversion to is failed