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Low-energy electron-beam lithography of hydrogen silsesquioxane
Haifang Yang, Aizi Jin, Qiang Luo, Changzhi Gu, Zheng Cui, Yifang ChenVolume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.004
File:
PDF, 191 KB
english, 2006