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Mechanical characterization of membrane like microelectronic components
M. Držı́k, H. Löschner, E. Haugeneder, W. Fallman, P. Hudek, I.W. Rangelow, Y. Sarov, T. Lalinský, J. Chlpı́kVolume:
83
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2006.01.020
File:
PDF, 271 KB
english, 2006