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Nickel stamp fabrication using step & stamp imprint lithography
Tomi Haatainen, Päivi Majander, Tommi Riekkinen, Jouni AhopeltoVolume:
83
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2006.01.038
File:
PDF, 620 KB
english, 2006