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Super-resolution near-field lithography using planar silver lenses: A review of recent developments
Richard J. Blaikie, David O.S. Melville, Maan M. AlkaisiVolume:
83
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2006.01.056
File:
PDF, 546 KB
english, 2006