Thermally driven microgripper as a tool for micro assembly

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

Thermally driven microgripper as a tool for micro assembly

Katerina Ivanova, Tzvetan Ivanov, Ali Badar, Burkhard E. Volland, Ivo W. Rangelow, Daniela Andrijasevic, Franz Sümecz, Stephanie Fischer, Manfred Spitzbart, Werner Brenner, Ivan Kostic
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Volume:
83
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2006.01.072
File:
PDF, 197 KB
english, 2006
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