Focused ion beam sculpted membranes for nanoscience tooling

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

Focused ion beam sculpted membranes for nanoscience tooling

A.-L. Biance, J. Gierak, É. Bourhis, A. Madouri, X. Lafosse, G. Patriarche, G. Oukhaled, C. Ulysse, J.-C. Galas, Y. Chen, L. Auvray
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Volume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.133
File:
PDF, 251 KB
english, 2006
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