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Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing
Maria Nordström, Jörg Hübner, Anja BoisenVolume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.185
File:
PDF, 172 KB
english, 2006