Scaling potential of pin-type 3-D SBT ferroelectric capacitors integrated in 0.18 μm CMOS technology
L. Goux, D. Maes, J.G. Lisoni, H. Vander Meeren, V. Paraschiv, L. Haspeslagh, C. Artoni, G. Russo, R. Zambrano, D.J. WoutersVolume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.04.004
File:
PDF, 281 KB
english, 2006