Progressive breakdown in ultrathin SiON dielectrics and its...

Microelectronics Reliability 2005 Vol. 45; Iss. 5-6

Progressive breakdown in ultrathin SiON dielectrics and its effect on transistor performance

Robert O’Connor, Greg Hughes, Robin Degraeve, Ben Kaczer
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Volume:
45
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2004.10.027
File:
PDF, 203 KB
english, 2005
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