Characterization of various insulators for possible use as...

Microelectronics Reliability 2005 Vol. 45; Iss. 5-6

Characterization of various insulators for possible use as low-k dielectrics deposited at temperatures below 200 °C

M. Vasilopoulou, A.M. Douvas, D. Kouvatsos, P. Argitis, D. Davazoglou
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Volume:
45
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2004.11.009
File:
PDF, 194 KB
english, 2005
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