Electrical properties of MIS capacitor using low temperature electron beam gun—evaporated HfAlO dielectrics
V. Mikhelashvili, B. Meyler, J. Shneider, O. Kreinin, G. EisensteinVolume:
45
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2004.11.022
File:
PDF, 225 KB
english, 2005