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Sample tilting technique for preventing electrostatic discharge during high-current FIB gas-assisted etching with XeF2
Hirotaka Komoda, Chie Moritani, Kazutaka Takahashi, Heiji Watanabe, Kiyoshi YasutakeVolume:
47
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.microrel.2006.04.013
File:
PDF, 448 KB
english, 2007