Distribution and generation of traps in SiO2/Al2O3 gate...

Microelectronics Reliability 2007 Vol. 47; Iss. 4-5

Distribution and generation of traps in SiO2/Al2O3 gate stacks

Isodiana Crupi, Robin Degraeve, Bogdan Govoreanu, David P. Brunco, Philippe Roussel, Jan Van Houdt
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Volume:
47
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.microrel.2007.01.013
File:
PDF, 129 KB
english, 2007
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