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Nitrogen bonding configurations near the oxynitride/silicon interface after oxynitridation in N2O ambient of a thin SiO2 gate
F. Monforte, M. Camalleri, D. Calì, G. Currò, E. Fazio, F. NeriVolume:
47
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.microrel.2007.01.037
File:
PDF, 190 KB
english, 2007