Characterization of charge trapping in SiO2/Al2O3...

Characterization of charge trapping in SiO2/Al2O3 dielectric stacks by pulsed C–V technique

Giuseppina Puzzilli, Bogdan Govoreanu, Fernanda Irrera, Maarten Rosmeulen, Jan Van Houdt
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Volume:
47
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2007.01.040
File:
PDF, 465 KB
english, 2007
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