Miniaturised multi-MEMS sensor development

Microelectronics Reliability 2009 Vol. 49; Iss. 6

Miniaturised multi-MEMS sensor development

Mathieu Hautefeuille, Brendan O’Flynn, Frank Peters, Conor O’Mahony
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Volume:
49
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2009.02.017
File:
PDF, 657 KB
english, 2009
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