Performance properties in thick film silicate dielectric...

Performance properties in thick film silicate dielectric layers using molecular modeling

Nancy Iwamoto, Ahila Krishnamoorthy, Richard Spear
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Volume:
49
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.microrel.2009.03.010
File:
PDF, 995 KB
english, 2009
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