Observation of halo implant from the drain side reaching...

Microelectronics Reliability 2010 Vol. 50; Iss. 3

Observation of halo implant from the drain side reaching the source side and vice versa in extremely short p-channel transistors

W.S. Lau, Peizhen Yang, Eng Hua Lim, Yee Ling Tang, Seow Wei Lai, V.L. Lo, S.Y. Siah, L. Chan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
50
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2009.12.006
File:
PDF, 525 KB
english, 2010
Conversion to is in progress
Conversion to is failed