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Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/Ge/SiO2/Si structure
A. Łaszcz, J. Ratajczak, A. Czerwinski, J. Kątcki, V. Srot, F. Phillipp, P.A. van Aken, N. Breil, G. Larrieu, E. DuboisVolume:
154-155
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2008.10.002
File:
PDF, 840 KB
english, 2008