Differential Hall characterisation of ultrashallow doping in advanced Si-based materials
N.S. Bennett, N.E.B. Cowern, A.J. Smith, M. Kah, R.M. Gwilliam, B.J. Sealy, T.C.Q. Noakes, P. Bailey, D. Giubertoni, M. BersaniVolume:
154-155
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2008.10.003
File:
PDF, 451 KB
english, 2008