![](/img/cover-not-exists.png)
T-shaped shallow trench isolation with unfilled floating void
F. Irrera, G. Puzzilli, L. Ricci, F. Russo, F. StirpeVolume:
52
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2008.05.002
File:
PDF, 508 KB
english, 2008