![](/img/cover-not-exists.png)
Low-temperature solid-phase crystallization of amorphous SiGe films on glass by imprint technique
Kaoru Toko, Hiroshi Kanno, Atsushi Kenjo, Taizoh Sadoh, Tanemasa Asano, Masanobu MiyaoVolume:
52
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.sse.2008.05.009
File:
PDF, 371 KB
english, 2008