Interface and electrical properties of La-silicate for direct contact of high-k with silicon
K. Kakushima, K. Tachi, M. Adachi, K. Okamoto, S. Sato, J. Song, T. Kawanago, P. Ahmet, K. Tsutsui, N. Sugii, T. Hattori, H. IwaiVolume:
54
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2010.03.005
File:
PDF, 576 KB
english, 2010