Benchmarking SOI and bulk FinFET alternatives for PLANAR CMOS scaling succession
T. Chiarella, L. Witters, A. Mercha, C. Kerner, M. Rakowski, C. Ortolland, L.-Å. Ragnarsson, B. Parvais, A. De Keersgieter, S. Kubicek, A. Redolfi, C. Vrancken, S. Brus, A. Lauwers, P. Absil, S. BieseVolume:
54
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2010.04.010
File:
PDF, 1.79 MB
english, 2010