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Strain relaxation by stripe patterning in Si/Si1 − xGex/Si(100) heterostructures
Jangwoong Uhm, Masao Sakuraba, Junichi MurotaVolume:
508
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.08.396
File:
PDF, 217 KB
english, 2006