Electromagnetic sources of nonuniformity in large area...

Thin Solid Films 2007 Vol. 515; Iss. 12

Electromagnetic sources of nonuniformity in large area capacitive reactors

A.A. Howling, L. Sansonnens, Ch. Hollenstein
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Volume:
515
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2006.10.093
File:
PDF, 635 KB
english, 2007
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