Estimation of defect generation probability in thin Si...

Estimation of defect generation probability in thin Si surface damaged layer during plasma processing

Koji Eriguchi, Akira Ohno, Daisuke Hamada, Masayuki Kamei, Kouichi Ono
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Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.11.035
File:
PDF, 335 KB
english, 2008
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