Experimental verification of three-dimensional simulations...

Experimental verification of three-dimensional simulations of LTO layer deposition on structures prepared by anisotropic wet etching of silicon

E Bär, J Lorenz, H Ryssel
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Volume:
38
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0026-2714(97)00039-5
File:
PDF, 233 KB
english, 1998
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