Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25μm Ti-silicided poly lines
E.P. Vandamme, I. De Wolf, A. Lauwers, L.K.J. VandammeVolume:
38
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0026-2714(98)00114-0
File:
PDF, 381 KB
english, 1998