Effect of time-varying axial magnetic field on high aspect...

Thin Solid Films 2003 Vol. 435; Iss. 1-2

Effect of time-varying axial magnetic field on high aspect ratio contact hole etching

Ho-Young Song, Yong-Hee Choi, Beom-hoan O, Se-Geun Park, Jin-Sung Oh, Jin-Woong Kim
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Volume:
435
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(03)00382-1
File:
PDF, 649 KB
english, 2003
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